The actuator shown in the Figures includes a movable microstructure which is made by a combination of the LIGA procedure (x-ray depth lithography) with galvanic forming and plastic molding and with a sacrificial layer technique. This method makes it possible to produce microstructures with structure heights of up to several hundred micrometers with lateral dimensions of a few micrometers. By additionally utilizing a sacrificial layer technique, relative movable parts can be made at the same time. The principle of manufacture will be described later.